2

Role of titanium in Ti/Ni ohmic contact on n-type 6H-SiC

Petr Macháč, Bohumil Barda, Marie Kudrnová
Journal:
Microelectronic Engineering
Année:
2010
Langue:
english
Fichier:
PDF, 466 KB
english, 2010
3

Improvement of Ni/Si/4H-SiC ohmic contacts by VLS grown sub-contact layer

Petr Macháč, Bohumil Barda
Journal:
Microelectronic Engineering
Année:
2010
Langue:
english
Fichier:
PDF, 483 KB
english, 2010
7

Structural characterization of nickel–titanium film on silicon carbide

Petr Macháč, Bohumil Barda, Jaroslav Maixner
Journal:
Applied Surface Science
Année:
2008
Langue:
english
Fichier:
PDF, 170 KB
english, 2008
8

Thermal degradation of Ni-based Schottky contacts on 6H–SiC

Bohumil Barda, Petr Macháč, Stanislav Cichoň, Marie Kudrnová
Journal:
Applied Surface Science
Année:
2011
Langue:
english
Fichier:
PDF, 502 KB
english, 2011
9

Sputtering of Ni/Ti/SiC ohmic contacts

Petr Machac, Bohumil Barda, Marie Hubickova
Journal:
Microelectronic Engineering
Année:
2008
Langue:
english
Fichier:
PDF, 313 KB
english, 2008
10

Ti and Ti/Sb ohmic contacts on n-type 6H–SiC

Bohumil Barda, Petr Macháč, Marie Hubičková
Journal:
Microelectronic Engineering
Année:
2008
Langue:
english
Fichier:
PDF, 143 KB
english, 2008
11

Si ohmic contacts on N-type SiC studied by XPS

Cichoň, Stanislav, Macháč, Petr, Barda, Bohumil, Kudrnová, Marie
Journal:
Microelectronic Engineering
Année:
2013
Langue:
english
Fichier:
PDF, 1.35 MB
english, 2013